Selective area epitaxy of GaAs using very low energy Ga+ focused ion beam deposition combined with molecular beam epitaxial growth
Selective area epitaxy of GaAs using very low energy Ga+ focused ion beam deposition combined with molecular beam epitaxial growth
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使用极低能量 Ga 聚焦离子束沉积与分子束外延生长相结合的 GaAs 选择性区域外延
DOI:
10.1016/s0022-0248(96)01028-7
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发表时间:
1997
期刊:
影响因子:
--
通讯作者:
D. Ritchie
中科院分区:
文献类型:
--
作者:
H. Beere;J. H. Thompson;G. Jones;D. Ritchie