Vibration transmission of an USM: rotor observed by phase-shift interferometry
Vibration transmission of an USM: rotor observed by phase-shift interferometry
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USM 的振动传输：通过相移干涉测量法观察转子
DOI：
10.1109/mhs.2000.903299
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发表时间：
2000
期刊：
影响因子：
--
通讯作者：
K. Hane
中科院分区：
文献类型：
--
作者：
T. Yamamoto;A. Torii;A. Ueda;K. Hane
我们评估振动型微器件的性能。频闪相移干涉法能够对高速（/spl sim/MHz）和微小（/spl sim/10 nm）的振动进行成像，并应用于微器件的位移测量。激光二极管，这是用作干涉测量的光源，照射频闪，以观察在高频振动的对象。相移算法用于获得高对比度图像。光学系统采用Fizeau型干涉仪，消除了光学噪声。以由转子和定子组成的超声波电机为研究对象。定子的振动频率约为50 kHz。在我们以前的工作中，几个不同的振动相位的定子的振动分布进行了测量。通过对定子表面振动分布的分析，得到了定子表面的振动状态。本文对超声波电机转子表面的振动状态进行了测量。当超声波电机的转子由定子的小振动驱动时，转子表面变形。因此，根据驱动信号的相位测量转子表面上具有不同振动相位的一些振动分布。并对振动分布进行了比较。结果，振动分布的变化证明了转子表面的运动。
We evaluate the performance of vibration-type microdevices. Stroboscopic phase-shift interferometry is capable of imaging high speed (/spl sim/MHz) and small(/spl sim/10 nm) vibration and is applied to displacement measurement of the microdevices. A laser diode, which is used as a light source of the interferometry, is irradiated stroboscopically in order to observe an object vibrating at high frequency. A phase-shift algorithm is used to obtain high contrast images. The optical system is a Fizeau-type interferometer which eliminates optical noises. An ultrasonic motor (USM), consisting of a rotor and a stator, is used as test object. The vibration frequency of the stator is about 50 kHz. In our previous work, several vibration distributions of the stator with different vibration phases were measured. A vibration state on the stator surface has been obtained by some vibration distributions. In this paper, we measure the vibration state of the rotor surface of the USM. When the rotor of the USM is driven by small vibration of the stator, the rotor surface is deformed. Therefore, some vibration distributions on the rotor surface with different vibration phases are measured according to the phase of the driving signal. The vibration distributions are compared with each other. As a result, the change of the vibration distribution proves the movement of the surface of the rotor.