The realization of high-quality 4H-SiC C-face grown crystals by controlling the macrosteps formation during solution growth

The realization of high-quality 4H-SiC C-face grown crystals by controlling the macrosteps formation during solution growth
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通过控制溶液生长过程中宏观台阶的形成实现高质量4H-SiC C面生长晶体

DOI:
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发表时间:
2016
期刊:
影响因子:
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通讯作者:
T.Ujihara
T.Ujihara
中科院分区:
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文献类型:
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作者:
S. Y. Xiao;S. Harada;P. L. Chen;K. Murayama;T.Ujihara

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