Norikiyo KATO: "Synthesis of Novel Organosilicon-containing Polymers and Their Properties as Electron-Beam Resist Materials" J.Photopolymer Science and Technology. 5. 585-588 (1992)
Norikiyo KATO: "Synthesis of Novel Organosilicon-containing Polymers and Their Properties as Electron-Beam Resist Materials" J.Photopolymer Science and Technology. 5. 585-588 (1992)
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加藤则清:“新型有机硅聚合物的合成及其作为电子束抗蚀剂材料的性能”J.光聚合物科学与技术。
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