Observation of instability in presence of E×B flow in a direct current cylindrical magnetron discharge plasma

Observation of instability in presence of E×B flow in a direct current cylindrical magnetron discharge plasma
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直流圆柱形磁控管放电等离子体中E×B流不稳定性的观察

DOI:
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发表时间:
2004
期刊:
影响因子:
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通讯作者:
H. Bailung
H. Bailung
中科院分区:
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文献类型:
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作者:
A. R. Pal;J. Chutia;H. Bailung

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在直流圆柱形磁控管等离子体中存在交叉电场和磁场的情况下,观察到电子碰撞频率和电子回旋频率之间的中频范围(50–100 MHz)的静电不稳定性。在磁场和放电电压的特定值处,不稳定性的幅度变得最大。可以看出,当磁场增加时,不稳定在较低放电电压处达到峰值。仅当中性气体压力足够低(∼4×10−3 mbar)时,不同的不稳定模式才会显着。当磁场较高 (>200 G) 时,不稳定性会受到抑制。当其频率与不稳定性频率匹配时,通过阴极施加到等离子体的恒定幅度测试信号就会增强。电流-电压特性在不稳定激励区域形成磁滞回线。
An electrostatic instability with an intermediate frequency range (50–100 MHz) between the electron collision frequency and electron cyclotron frequency has been observed in presence of crossed electric and magnetic fields in a dc cylindrical magnetron plasma. The amplitude of the instability becomes maximum at particular values of the magnetic field and the discharge voltage. It is seen that when the magnetic field is increased the instability peaks at lower discharge voltages. The different modes of instability are prominent only when the neutral gas pressure is sufficiently low (∼4×10−3 mbar). The instability becomes suppressed when the magnetic field is high (>200 G). A constant amplitude test signal applied to the plasma through the cathode grows when its frequency matches with the frequency of the instability. The current-voltage characteristics form hysteresis loop in the instability excitation region.