Control of High-k / Ge Interface Properties through Selection of High-k Materials and Suppression of GeO Volatilizaiton (招待講演)
Control of High-k / Ge Interface Properties through Selection of High-k Materials and Suppression of GeO Volatilizaiton (招待講演)
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通过选择高k材料和抑制GeO挥发来控制高k/Ge界面特性(特邀报告)
DOI:
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发表时间:
2007
期刊:
影响因子:
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通讯作者:
and A. Toriumi
中科院分区:
文献类型:
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作者:
K. Kita;T. Takahashi;H. Nomura;S. Suzuki;T. Nishimura;and A. Toriumi