Femtosecond laser surface irradiation of silicon in air: Pulse repetition rate influence on crater features and surface texture
Femtosecond laser surface irradiation of silicon in air: Pulse repetition rate influence on crater features and surface texture
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DOI：
10.1016/j.optlastec.2020.106073
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发表时间：
2020-06-01
影响因子：
5
通讯作者：
Amoruso, S.
中科院分区：
文献类型：
--
作者：
Allahyari, E.;Nivas, J. Jj;Amoruso, S.
在 10 Hz - 200 kHz 范围内，通过实验研究了脉冲重复率对空气中飞秒激光脉冲激光照射硅的影响。通过利用表面轮廓测定法和扫描电子显微镜来表征所产生的凹坑的特征以及在其表面上产生的激光诱导的周期性表面结构。实验表征证明了脉冲重复率对凹坑尺寸的有趣影响，定性地解决了较高重复率下材料去除效率的逐渐降低。此外，由固定数量的激光脉冲（即N = 100）的照射序列产生的表面结构也显示出对重复率的明显依赖性。通过考虑在高重复率激光系统的激光加工过程中通常观察到的羽流屏蔽和热积累效应的可能影响，使观察到的效应合理化。
The influence of the pulse repetition rate on laser irradiation of silicon, in air, with femtosecond laser pulses is experimentally investigated in the range 10 Hz - 200 kHz. The features of the produced crater and the laserinduced periodic surface structures generated on its surface are characterized by exploiting surface profilometry and scanning electron microscopy. The experimental characterization evidences an interesting influence of the pulse repetition rate on the crater size qualitatively addressing a progressive reduction of the material removal efficiency at higher repetition rates. Moreover, also the surface structures produced by an irradiation sequence with a fixed number of laser pulses (namely N = 100) shows a clear dependence on the repetition rate. The observed effects are rationalized by considering the possible influence of plume shielding and heat accumulation effects typically observed during laser processing with high repetition rate laser systems.