Laser-Induced Deterioration Grinding of Zirconium Oxide (ZrO2) – Generation of Layer Patterns and Performance Evaluation
Laser-Induced Deterioration Grinding of Zirconium Oxide (ZrO2) – Generation of Layer Patterns and Performance Evaluation
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DOI：
10.5545/sv-jme.2015.2794
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发表时间：
2015-12
影响因子：
1.7
通讯作者：
Zhang Xiaohong;Deng Zhaohui;Yinhui Ren;Chen Genyu;Wei Liu;G. Zhang
中科院分区：
文献类型：
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作者：
Zhang Xiaohong;Deng Zhaohui;Yinhui Ren;Chen Genyu;Wei Liu;G. Zhang
提出了用于牙科、半导体和汽车工业的氧化锆陶瓷湿法磨削的激光劣化处理方法。从理论上分析了激光诱导变质和湿法磨削变质层的机理，提出了决定激光诱导凹坑微观形貌和分布的四个关键工艺参数：激光功率密度Ip、离焦距离z、激光光斑重叠率us和激光扫描轨迹线重叠率Ul。在此基础上，研究了不同激光功率密度、不同离焦距离下单脉冲诱导凹坑的形成机理，以及纵向和横向相邻光斑之间的相互作用机制。确定了关键工艺参数的最佳值。为了进一步客观评价激光劣化的效果，在激光诱导劣化湿式磨削(LIDWG)和常规磨削(CG)条件下进行了对比试验。结果表明，激光劣化过程对磨削效果有很大影响。LIDWG条件下的法向磨削力和切向磨削力均低于CG条件下的磨削力，最大降幅为59.2%(62.9%)。
Laser-induced deterioration was proposed for the wet grinding of zirconium oxide (ZrO2) ceramic used in the dental, semiconductor and automotive industries. The mechanisms for laser induced deterioration and wet grinding of the deterioration layer were theoretically analysed, and the four key processing parameters that determine the micro-topography and distribution of the laser-induced crater were proposed, including the laser power density Ip, the defocus distance z, the laser spot overlap ratio Us and the laser scanning track line overlap ratio Ul. Further, the forming mechanism of the single pulse-induced crater under different laser power densities, the defocus distance, and the interaction mechanisms between adjacent spots along the longitudinal and transverse directions were investigated. The optimal values of the key processing parameters were identified. To further evaluate the effect of laser-induced deterioration objectively, a comparative experiment was conducted under laser-induced deterioration wet grinding (LIDWG) and conventional grinding (CG) conditions. It was found that the procedure of laser-induced deterioration had a strong influence on the grinding results. The normal and tangential grinding forces for LIDWG condition were lower than for CG condition, with a maximum reduction of 59.2% (62.9%).