A Hydrogen Gas Sensor Based on TiO₂ Nanoparticles on Alumina Substrate.
A Hydrogen Gas Sensor Based on TiO₂ Nanoparticles on Alumina Substrate.
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DOI：
10.3390/s18082483
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发表时间：
2018-08-01
期刊：
影响因子：
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通讯作者：
Abdullah NH
中科院分区：
文献类型：
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作者：
Mohd Chachuli SA;Hamidon MN;Mamat MS;Ertugrul M;Abdullah NH
半导体气体传感器对工作温度低至100℃的高要求，导致了基于纳米二氧化钛的气体传感器的制备。将气敏材料、二氧化钛(P25)与玻璃粉、三氧化二硼与有机粘结剂混合制成气敏薄膜。将敏感膜在500℃的温度下30min进行了热处理。用场发射扫描电子显微镜(FESEM)、能量色散X射线能谱(EDX)和X射线衍射仪(XRD)对敏感膜的形貌和结构进行了表征。该气体传感器暴露在浓度为100-1000ppm的氢气中，并在100°C、200°C和300°C不同的工作温度下进行测试，以找到产生最高灵敏度的最佳工作温度。该气体传感器在接触氢气时表现出基于电流减小的p型电导。该气体传感器在100°C下显示出对低浓度氢的传感能力，最低可达100ppm。
High demand of semiconductor gas sensor works at low operating temperature to as low as 100 °C has led to the fabrication of gas sensor based on TiO2 nanoparticles. A sensing film of gas sensor was prepared by mixing the sensing material, TiO2 (P25) and glass powder, and B2O3 with organic binder. The sensing film was annealed at temperature of 500 °C in 30 min. The morphological and structural properties of the sensing film were characterized by field emission scanning electron microscopy (FESEM), energy-dispersive X-ray spectroscopy (EDX) and X-ray diffraction (XRD). The gas sensor was exposed to hydrogen with concentration of 100–1000 ppm and was tested at different operating temperatures which are 100 °C, 200 °C, and 300 °C to find the optimum operating temperature for producing the highest sensitivity. The gas sensor exhibited p-type conductivity based on decreased current when exposed to hydrogen. The gas sensor showed capability in sensing low concentration of hydrogen to as low as 100 ppm at 100 °C.