Remarkable Breakdown Voltage Enhancement in A1GaN Channel HEMTs operation of A1GaN channel high electron mobility transistors with sufficiently low resistive source/drain contact formed by Si ion implantation

Remarkable Breakdown Voltage Enhancement in A1GaN Channel HEMTs operation of A1GaN channel high electron mobility transistors with sufficiently low resistive source/drain contact formed by Si ion implantation
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通过 Si 离子注入形成具有足够低电阻的源极/漏极接触的 A1GaN 沟道高电子迁移率晶体管的 A1GaN 沟道 HEMT 操作中击穿电压显着增强

DOI:
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发表时间:
2007
期刊:
影响因子:
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通讯作者:
T. Nanjo,
T. Nanjo,
中科院分区:
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文献类型:
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作者:
T.Asano;B.-S.Song;S.Noda;中西祥人;A.Yamasaki et al.;〓;H.Sumiya;T. Nanjo,

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