Highly efficient color filter array using resonant Si3N4 gratings
Highly efficient color filter array using resonant Si3N4 gratings
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DOI：
10.1364/oe.21.012495
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发表时间：
2013-05-20
期刊：
影响因子：
3.8
通讯作者：
Magnusson, Robert
中科院分区：
文献类型：
--
作者：
Uddin, Mohammad Jalal;Magnusson, Robert
我们展示了一个高效的导模共振滤色器阵列的设计和制造。该设备的设计使用基于严格的耦合波分析的数值方法，并使用紫外激光干涉光刻图案。它由一个60 nm厚的亚波长氮化硅光栅沿着与105 nm厚的均匀氮化硅波导在玻璃基板上。所制造的器件表现出蓝色，绿色，和红色的光栅周期分别为274，327和369 nm的响应。像素具有类似于12 nm的光谱带宽，在蓝色、绿色和红色滤色器的中心波长处的效率分别为94%、96%和99%。这些都是更高的效率比以前在文献中报道。(C)2013年美国光学学会
We demonstrate the design and fabrication of a highly efficient guided-mode resonant color filter array. The device is designed using numerical methods based on rigorous coupled-wave analysis and is patterned using UV-laser interferometric lithography. It consists of a 60-nm- thick subwavelength silicon nitride grating along with a 105-nm-thick homogeneous silicon nitride waveguide on a glass substrate. The fabricated device exhibits blue, green, and red color response for grating periods of 274, 327, and 369 nm, respectively. The pixels have a spectral bandwidth of similar to 12 nm with efficiencies of 94%, 96%, and 99% at the center wavelength of blue, green, and red color filter, respectively. These are higher efficiencies than reported in the literature previously. (C) 2013 Optical Society of America