BaSi2 and thin film alkaline earth silicides on silicon
BaSi2 and thin film alkaline earth silicides on silicon
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BaSi2 和硅上碱土金属硅化物薄膜
DOI：
10.1063/1.110297
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发表时间：
1993
影响因子：
4
通讯作者：
R. Raj
中科院分区：
文献类型：
--
作者：
R. Mckee;F. Walker;J. Conner;R. Raj
研究了碱土金属与硅的外延结构发展和表面反应随表面复盖度的变化。从亚单层结构到厚膜正交相BaSi2都对BaSi2反应进行了详细的表征。从0到1的单层，形成了一系列有序的表面结构，这表明它是立方的BaSi化合物。我们还表明，锶、钙和镁形成了这些高度有序的亚单层硅化物。这些亚单层结构是在硅上异质外延转变为含碱土氧化物的模板。
The epitaxial structural development and surface reactions of the alkaline earth metals with silicon have been studied as a function of surface coverage. The barium reaction has been characterized in detail from submonolayer structures to the thick film orthorhombic phase, BaSi2. From 0 to 1 monolayer a series of ordered surface structures develops that suggests a cubic Ba‐Si compound. We have also shown that strontium, calcium, and magnesium develop these highly ordered submonolayer silicides. These submonolayer structures are the templates for the heteroepitaxial transition to alkaline earth containing oxides on silicon.