Miniaturized finger-size electron-beam column with ceramic-type lenses for scanning electron microscopy
Miniaturized finger-size electron-beam column with ceramic-type lenses for scanning electron microscopy
复制标题
用于扫描电子显微镜的带有陶瓷型透镜的小型手指大小电子束镜筒
DOI：
10.1116/1.1824062
复制
发表时间：
2004
影响因子：
1.4
通讯作者：
S. Amano
中科院分区：
文献类型：
--
作者：
M. Miyoshi;K. Okumura;S. Awata;Y. Okada;T. Maeda;H. Yamaguchi;S. Amano
为满足表面分析、检测与计量、电学测试等新应用的需要，研制了一种小型化的便携式扫描电子显微镜电子束镜筒，与传统电子束镜筒相比，大大减小了体积和重量。为了柱小型化和高精度透镜制造，我们构建了陶瓷透镜集成柱系统，其中所有的电光元件集成在一个陶瓷体中。在这次试生产中，我们使用了一种新开发的氧化铝基高阻导电陶瓷，用于优化这种静电透镜的操作。所有的透镜电极被金属化并在圆柱形高电阻率导电陶瓷的内表面上图案化，该圆柱形高电阻率导电陶瓷的体积电阻率为1010Ωcm。由于这里使用的陶瓷透镜集成柱集成了所有的透镜电极，并在连续的工艺中制造，因此可以减少机械对准误差。
A miniaturized electron-beam column has been developed for portable scanning electron microscope, which has greatly reduced size and weight compared with those of conventional electron-beam column, in order to satisfy the demands of new applications in surface analysis, inspection and metrology, electrical testing. For column miniaturization and high precision lens fabrication, we have constructed a ceramic lens integrated column system, in which all of the electro-optical elements are integrated in one ceramics body. In this trial production, we use a newly developed alumina-based high resistive conductive ceramics for the optimization of this electro-static lens operation. All the lens electrodes are metalized and patterned on the inner surface of the cylindrical high resistivity conductive ceramic whose volume resistivity is 1010Ωcm. As the ceramic lens integrated column used here integrates all the lens electrodes and manufactured in a consecutive process, the mechanical alignment error can be reduced...