Methods for the determination of the optical constants of thin films from single transmission measurements: a critical review
Methods for the determination of the optical constants of thin films from single transmission measurements: a critical review
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DOI：
10.1088/0022-3727/36/15/316
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发表时间：
2003-08-07
影响因子：
3.4
通讯作者：
Smet, PF
中科院分区：
文献类型：
--
作者：
Poelman, D;Smet, PF
光学透射测量通常用于薄膜光学常数的常规测定。本文概述了不同的方法来评估这些传输数据，导致值的复折射率。三组不同的方法被区分为：（1）至少两种不同的光学测量;（2）色散关系或一般物理约束，以近似波长相关折射率的行为;以及（3）作为第二变量的“虚拟”测量。对组（2）和（3）中的方法（只需要一次透射率测量）进行了更详细的处理，并对其精度进行了评估。
Optical transmission measurements are commonly used for the routine determination of thin film optical constants. This paper presents an overview of the different methods of evaluating these transmission data, leading to values for the complex refractive index. Three different groups of methods are distinguished using: (1) at least two different optical measurements; (2) dispersion relations or general physical constraints to approximate the behaviour of the wavelength-dependent refractive index; and (3) a 'virtual' measurement as a second variable. The methods from groups (2) and (3) (requiring only a single transmission measurement) are treated in more detail and are evaluated in terms of their accuracy.