Fabrication and test of a thermopneumatic micropump with a corrugated p plus diaphragm
Fabrication and test of a thermopneumatic micropump with a corrugated p plus diaphragm
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DOI：
10.1016/s0924-4247(99)00392-1
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发表时间：
2000-05-22
影响因子：
4.6
通讯作者：
Yang, SS
中科院分区：
文献类型：
--
作者：
Jeong, OC;Yang, SS
本文提出了一种通过微加工制造的热气动微型泵。微型泵由p+硅隔膜、微型加热器和一对喷嘴/扩散器组成。本文的热气动执行器的特点是采用波纹膜片，比平面膜片更灵活。隔膜由欧姆加热和自然冷却引起的气腔压力变化驱动。如果微型泵的隔膜振动，流体就会通过喷嘴/扩散器沿一个方向流动。实验结果表明，波纹膜片的挠度约为平面膜片的三倍。当输入电压为8 V、占空比为40%时，波纹隔膜微泵在4 Hz频率下的最大流量约为14 μl/min。 (C) 2000 Elsevier Science B.V. 保留所有权利。
This paper presents a thermopneumatic micropump fabricated by micromachining. The micropump consists of a p + silicon diaphragm, a micro heater and a pair of nozzle/diffuser. The thermopneumatic actuator of this paper is characterized by a corrugated diaphragm, which is more flexible than a flat one. The diaphragm is driven by the air cavity pressure variation caused by the ohmic heating and the natural cooling. If the diaphragm of the micropump vibrates, the fluid flows in one direction through a nozzle/diffuser. The experimental result illustrates that the deflection of the corrugated diaphragm is about three times that of the flat one. The maximum flow rate of the micropump with the corrugated diaphragm is about 14 mu l/min at 4 Hz when the input voltage and duty ratio are 8 V and 40%, respectively. (C) 2000 Elsevier Science B.V. All rights reserved.