Femtosecond Laser Direct Writing of 3D Silica-like Microstructure from Hybrid Epoxy Cyclohexyl POSS
Femtosecond Laser Direct Writing of 3D Silica-like Microstructure from Hybrid Epoxy Cyclohexyl POSS
复制标题
飞秒激光直写混合环氧环己基 POSS 的 3D 类二氧化硅微结构
DOI：
10.1002/admt.201700271
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发表时间：
2018-03-01
影响因子：
6.8
通讯作者：
Duan, Xuanming
中科院分区：
文献类型：
--
作者：
Fang, Gan;Cao, Hongzhong;Duan, Xuanming
鉴于环氧环己基多面体低聚倍半硅氧烷（epoxy-POSS）作为一种光学透明、高热稳定性和机械稳定性的类二氧化硅杂化材料的重要性，研究了以二苯基碘六氟磷酸盐为光酸产生剂的双光子引发环氧-POSS聚合用于紫外光刻和飞秒激光直写。该混合抗蚀剂表现出高的热稳定性：分解温度被发现在约350和400摄氏度时，在空气和氩气中煅烧，分别。通过能量色散X射线分析（EDX）、傅里叶变换红外光谱（FTIR）和元素分析，发现相应的煅烧产物为具有C1.5SiO3.5和C5 SiO 3化学式的二氧化硅状结构。提出了一个双光子聚合线宽与激光强度（P激光）和扫描速度（V）的函数关系式，用以描述高斯光对聚合线的影响。给出了该方程的实验验证，证明了非线性光学过程。在玻璃衬底上实现了分辨率为250 nm的线宽，而在硅晶片上制造时分辨率为400 nm。制备了3D结构的木材堆，并且在空气环境中300 ℃煅烧时没有体积收缩，证明了高的热稳定性。
Given the importance of epoxy cyclohexyl polyhedral oligomeric silsesquioxane (epoxy-POSS) as a silica-like hybrid material of optical clarity, high thermal and mechanic stability, the two-photon initiated polymerization of epoxy-POSS using diphenyliodonium hexafluorophosphate as photoacid generators for UV lithography and femtosecond laser direct writing is studied. The hybrid resist exhibits high thermal stability: decomposition temperatures are found at approximate to 350 and 400 degrees C when calcined in air and argon, respectively. The corresponding calcined products are found as silica-like structures with chemical formulas of C1.5SiO3.5 and C5SiO3, evidenced by energy dispersive X-ray analysis (EDX), fourier-transform infrared spectroscopy (FTIR), and elemental analysis. An equation regarding the two-photon polymerized line width as functions of intensity of laser (P-laser) and scanning speed (V) is proposed in describing the effect of Gaussian light on polymerized lines. Experimental verification of the equation is given to prove a nonlinear optical process. Line width with a resolution of 250 nm is achieved on a glass substrate, while the resolution is 400 nm when fabricated on a silicon wafer. 3D structured woodpiles are fabricated and show no volumetric shrinkage upon 300 degrees C calcination in air environment, demonstrating a high thermal stability.