Analysis and design of kinked (bent) beam sensors
Analysis and design of kinked (bent) beam sensors
复制标题
DOI：
10.1088/0960-1317/17/2/022
复制
发表时间：
2007-02-01
影响因子：
2.3
通讯作者：
Barker, N. Scott
中科院分区：
文献类型：
--
作者：
Begley, Matthew R.;Barker, N. Scott
本文描述了微制造的独立式“V”形梁，其可用于各种各样的传感应用，例如，温度、由微加工产生的残余应力和由分子吸附产生的表面应力。解析解推导出连接结构变形（即输出位移）的物理驱动力和几何形状。各种渐近极限来说明弯曲和轴向变形可以忽略的几何形状的范围。分析的一个有趣的含义是，最敏感的设备只有轻微的扭结，扭结角接近梁的宽长比。对于这样的结构，屈曲型变形所产生的位移可以比具有较大扭折角的结构的纯轴向伸长所产生的位移大得多。本文最后讨论了设计高灵敏度器件的影响，重点是利用非线性行为和构建聚合物结构的优势。
This paper describes microfabricated freestanding 'v'-shaped beams, which may be used for a wide variety of sensing applications, e.g., temperature, residual stress arising from microfabrication and surface stresses generated by molecular adsorption. Analytical solutions are derived that connect structural deformation (i.e. output displacement) to physical driving forces and geometry. Various asymptotic limits are presented to illustrate the range of geometries for which bending and axial deformation can be neglected. An intriguing implication of the analysis is that the most sensitive device is only slightly kinked, with a kink angle close to the width-to-length ratio of the beams. For such structures, the displacements produced by buckling-type deformation can be much larger than those produced by purely axial elongation of structures with larger kink angles. The paper concludes with a discussion of the implications for designing highly sensitive devices, with an emphasis on the advantages of exploiting nonlinear behavior and constructing polymeric structures.