Design considerations on large amplitude vibration of a doubly clamped microresonator with two symmetrically located electrodes
Design considerations on large amplitude vibration of a doubly clamped microresonator with two symmetrically located electrodes
复制标题
具有两个对称定位电极的双钳位微谐振器大振幅振动的设计考虑
DOI：
10.1016/j.cnsns.2014.08.011
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发表时间：
2015-05-01
影响因子：
3.9
通讯作者：
Wang, Wei
中科院分区：
文献类型：
--
作者：
Han, Jianxin;Zhang, Qichang;Wang, Wei
本文研究了具有两个对称定位电极的双钳位微谐振器，为此类微机电系统（MEMS）的大幅振动提供一些设计考虑。首先确定相应的哈密顿系统的平衡点。从能量的角度，根据势垒/势垒或同宿/异宿轨道的能量定量解释了大振幅振动和动态拉入现象，并推导了相应的参数区域。然后，引入经典梁理论的第一模态假设来研究物理参数对谐振器振动的影响。一些设计区域是从理论上获得的，然后进行数值验证。为了避免复杂的振动并获得更好的性能，采用梅尔尼科夫方法来预测混沌的存在。此外，利用分岔图和局部极大值法进行数值模拟，寻找稳定区域。此外，设计了四种可能的物理设备来检查模拟方法的有效性。 (C) 2014 Elsevier B.V. 保留所有权利。
In this paper, a doubly clamped microresonator with two symmetrically located electrodes is investigated to provide some design considerations on large amplitude vibration of this type of micro-electro-mechanical system (MEMS). The equilibrium points of the corresponding Hamiltonian system are determined at first. From the viewpoint of energy, large amplitude vibration and dynamic pull-in phenomenon are explained quantitatively according to the energy of potential barrier/well or the homoclinic/heteroclinic orbits, and the corresponding parameter regions are derived. Then, first mode assumption with classical beam theory is introduced to study the effect of physical parameters on the vibration of the resonator. Some design regions are theoretically obtained and then numerically verified. To avoid complicated vibration and obtain better performance, Melnikov method is applied to predict the existence of chaos. Besides, numerical simulation is carried out to find the stable regions by using bifurcation diagrams with local maximum method. Furthermore, four possible physical devices are designed to examine the effectiveness of the simulation approach. (C) 2014 Elsevier B.V. All rights reserved.