LETTER TO THE EDITOR: Reconstructing the density matrix of a spin s through Stern-Gerlach measurements: II
LETTER TO THE EDITOR: Reconstructing the density matrix of a spin s through Stern-Gerlach measurements: II
复制标题
致编辑的信：通过 Stern-Gerlach 测量重建自旋 s 的密度矩阵：II
DOI：
10.1088/0305-4470/32/25/101
复制
发表时间：
1999
期刊：
影响因子：
--
通讯作者：
S. Weigert
中科院分区：
文献类型：
--
作者：
J. Amiet;S. Weigert
一种制造具有整体狭缝屏蔽的焦平面阵列的方法，该方法包括制造具有多个检测器元件的焦平面阵列。然后在阵列上方形成具有平坦顶表面的电绝缘材料层，优选为旋涂环氧树脂。然后，在电绝缘材料层上方形成反射层，并且仅在检测器元件上方的其区域中蚀刻电绝缘层和反射层，以在所述检测器元件上方形成槽。用定向蚀刻剂蚀刻电绝缘层。电绝缘材料的蚀刻层限定槽中的侧壁，来自侧壁的材料被去除以限定非平面侧壁。非平面侧壁优选地具有基本上锯齿形状。
A method of fabricating a focal plane array having an integral slot shield which comprises fabricating a focal plane array having a plurality of detector elements. A layer of electrically insulating material, preferably a spun on epoxy, having a planar top surface is then formed over the array. A reflective layer is then formed over the layer of electrically insulating material and the electrically insulating layer and reflective layer are etched only in the regions thereof over the detector elements to form slots over said detector elements. The electrically insulating layer is etched with a directional etchant. The etched layer of electrically insulating material defines side walls in the slots, material from the side walls being removed to define non-planar sidewalls. The non-planar side walls preferably have an essentially sawtooth shape.