Antireflective coating using aluminum hydroxide formed by hydrothermal treatment of sputtered aluminum films
Antireflective coating using aluminum hydroxide formed by hydrothermal treatment of sputtered aluminum films
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DOI：
10.1063/1.3181057
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发表时间：
2009-07
影响因子：
3.2
通讯作者：
T. Ishiguro;T. Hori;Z. Qiu
中科院分区：
文献类型：
--
作者：
T. Ishiguro;T. Hori;Z. Qiu
本文提出了一种制备减反射膜的简单方法。通过将射频溅射的金属Al膜放入沸腾的超纯水中，膜变得透明。其透光率超过玻璃基板本身。此外，在两侧具有这种涂层的玻璃基板在特定波长下显示出几乎完美的透射率。通过电子衍射，证实了转化膜的晶体结构为勃姆石。透明膜的折射率估计为玻璃和空气的中值之一。
Here we have proposed a simple method for forming antireflective coating. By putting a rf sputtered metallic Al film into boiling ultrapure water, the film becomes transparent. Its optical transmittance exceeds the glass substrate itself. In addition, the glass substrate with such coating on both sides shows almost perfect transmittance at specific wavelengths. By electron diffraction, the crystal structure of the transformed film is confirmed to be boehmite. The refractive index of the transparent film is estimated to be one of the median values of the glass and air.