Development of oxide thick film capacitors for a real time pressure monitoring system
Development of oxide thick film capacitors for a real time pressure monitoring system
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DOI：
10.1016/j.msec.2006.06.003
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发表时间：
2007-09-01
期刊：
影响因子：
--
通讯作者：
Kaneswaran, K.
中科院分区：
文献类型：
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作者：
Arshak, K.;Morris, D.;Kaneswaran, K.
准确的压力读数是广泛应用中必不可少的工具。例如，监测头部受伤患者的颅内压或轮胎压力，以提高汽车安全性。考虑到这一点，一个真实的时间监测系统，它显示在PC上的压力传感器电容的变化，已经开发出来。厚膜电容器与使用五氧化二铌（Nb 2 O 5），二氧化钛（TiO 2）和二氧化铈（CeO 2）形成的氧化物电介质层的研究使用该系统。用扫描电子显微镜（SEM）观察了厚膜的形貌和粒径。为了帮助开发一个合适的接口电路，每个设备的频率和温度依赖性进行了研究。然后，每个传感器都承受0-100 kPa范围内的压力。结果表明，具有Nb 2 O 5介质层的电容器是最敏感的。人们认为这是由于它的颗粒大小。(C)2006 Elsevier B. V.保留所有权利。
Accurate pressure readings are essential tools in a wide range of applications. For example in monitoring intracranial pressure for patients with head injuries or tyre pressure to improve automobile safety. With this in mind, a real time monitoring system, which displays the change in sensor capacitance with pressure on a PC, has been developed. Thick film capacitors with an oxide dielectric layer formed using nobium pentoxide (Nb2O5), titanium dioxide (TiO2) and cerium dioxide (CeO2) are investigated using this system. SEM was used to examine the morphology and particle size of the thick films. To aid in the development of a suitable interface circuitry, the frequency and temperature dependence of each device is investigated. Each sensor was then subjected to pressures in the region of 0-100 kPa. The results show that capacitors with an Nb2O5 dielectric layer were most sensitive. It is thought that this is due to its particle size. (C) 2006 Elsevier B.V. All rights reserved.