LCOS spatial light modulator controlled by 12-bit signals for optical phase-only modulation
LCOS spatial light modulator controlled by 12-bit signals for optical phase-only modulation
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由 12 位信号控制的 LCOS 空间光调制器，用于仅光学相位调制
DOI：
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发表时间：
2007
期刊：
影响因子：
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通讯作者：
Yuji Kobayashi
中科院分区：
文献类型：
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作者：
Takashi Inoue;Hiroshi Tanaka;N. Fukuchi;M. Takumi;Naoya Matsumoto;T. Hara;N. Yoshida;Y. Igasaki;Yuji Kobayashi
研制了一种用于纯相位调制的硅基液晶空间光调制器。SLM主要用于自适应光学、光学操纵、激光加工等领域的波前控制。像素的数量为792 X 612，并且它们的尺寸为20 X 20微米平方。相位调制的范围超过一个波长，并且单色光的光利用效率约为90%。SLM的硅背板在机械上不牢固，并且其表面不平坦。差的平坦度降低了来自SLM的输出波前。该器件由数字视频接口（DVI）接收器、现场可编程门阵列和12位数模转换器（DAC）组成的电子器件驱动。来自DAC的转换后的模拟电压信号被传输到SLM的像素并产生相位变化。驱动器根据板形补偿程度的不同，有多种控制方式。在其中一种模式下，驱动器接收12位数据并将其直接传输到DAC。通过这种12位控制模式，能够高度灵活地控制器件特性。在演示文稿中，我们报告的设备和实验结果的失真补偿从设备的输出波前的细节。
We developed a liquid-crystal-on-silicon (LCOS) spatial light modulator (SLM) for phase-only modulation. The SLM was designed mainly for wavefront control in adaptive optics, optical manipulation, laser processing, etc. A dielectric multilayer mirror was incorporated into the device to enhance the reflectivity. The number of pixels was 792 x 612 and their size was 20 x 20 microns square. The range of the phase modulation exceeded one wavelength, and the light-utilization efficiency for monochromatic light was approximately 90%. The silicon backplane of the SLM was mechanically weak and its surface was not flat. The poor flatness degraded the output wavefront from the SLM. The device was driven by electronics composed of a digital-visual-interface (DVI) receiver, a field programmable gate array, and 12-bit digital-to-analog converters (DACs). The converted analog voltage signals from the DACs were transmitted to the pixels of the SLM and created phase changes. The driver had several kinds of control modes for the device, according to the level of flatness compensation. In one of the modes, the driver received 12-bit data and transferred them directly to the DACs. This 12-bit control mode enabled highly flexible control of the device characteristics. In the presentation, we report details of the device and experimental results on compensation of distortion in the output wavefront from the device.