On the prospects of using Biogenic Silica for MEMS ( Micro-Electro-Mechanical Systems )

On the prospects of using Biogenic Silica for MEMS ( Micro-Electro-Mechanical Systems )
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发表时间:
2019
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通讯作者:
B. Abdusatorov;J. Everaerts;A. Salimon;A. Korsunsky
B. Abdusatorov;J. Everaerts;A. Salimon;A. Korsunsky
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其他
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作者:
B. Abdusatorov;J. Everaerts;A. Salimon;A. Korsunsky

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被称为硅藻的单细胞海洋生物的一个关键特征是它们具有纳米多孔形态的二氧化硅外骨骼。这些自然生长的结构为新的仿生结构设计提供了有希望的基础,但也可以直接以其天然形式使用。在自然界中发现的微尺度隔膜通常可以承受大的变形。它们还显示出在高MHz至GHz范围内的振动本征频率。这些结构特性为基于生物启发或生物衍生的微尺度结构的微操作的生产技术的开发开辟了可能性。在这项工作中,我们报告的有限元模拟的结果,旨在调查刚度,孔径和厚度的硅藻硅藻壳结构的振动特性的影响。
A key feature of single-cell marine organisms called diatoms is their silica exoskeleton with nanoporous morphology. These naturally grown structures provide a promising basis for new biomimetic structural designs, but may also be used directly in their native form. Microscale diaphragms found in nature often can withstand large deformations. They also show vibration eigenfrequencies in the high MHz to GHz range. These structural properties open up the possibilities for the development of production technologies based on micromanipulation of bio-inspired or bio-derived microscale structures. In this work we report the results of FEM simulations aimed at investigating the effects of stiffness, pore diameter, and thickness on the vibrational characteristics of diatom frustule structures.