Integrated Design of Mechanism and Control for High-Precision Stages by the Interaction Index in the Direct Nyquist Array Method

Integrated Design of Mechanism and Control for High-Precision Stages by the Interaction Index in the Direct Nyquist Array Method
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直接奈奎斯特阵列法中相互作用指数高精度级机构与控制一体化设计

DOI:
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发表时间:
2015
期刊:
影响因子:
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通讯作者:
Kazuaki Saiki
Kazuaki Saiki
中科院分区:
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文献类型:
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作者:
Wataru Ohnishi;Hiroshi Fujimoto;Koichi Sakata;Kazuhiro Suzuki;Kazuaki Saiki

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