Effects of instrument imperfections on quantitative scanning transmission electron microscopy
Effects of instrument imperfections on quantitative scanning transmission electron microscopy
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DOI：
10.1016/j.ultramic.2015.10.026
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发表时间：
2016-02-01
期刊：
影响因子：
2.2
通讯作者：
Rosenauer, Andreas
中科院分区：
文献类型：
--
作者：
Krause, Florian F.;Schowalter, Marco;Rosenauer, Andreas
Several instrumental imperfections of transmission electron microscopes are characterized and their effects on the results of quantitative scanning electron microscopy (STEM) are investigated and quantified using simulations. Methods to either avoid influences of these imperfections during acquisition or to include them in reference calculations are proposed. Particularly, distortions inflicted on the diffraction pattern by an image-aberration corrector can cause severe errors of more than 20% if not accounted for. A procedure for their measurement is proposed here. Furthermore, afterglow phenomena and nonlinear behavior of the detector itself can lead to incorrect normalization of measured intensities. Single electrons accidentally impinging on the detector are another source of error but can also be exploited for threshold-less calibration of STEM images to absolute dose, incident beam current determination and measurement of the detector sensitivity. (C) 2015 Elsevier B.V. All rights reserved.
