Gold microelectrodes fabricated by a print-and-imprint method using laser-drilled polyimide through-hole masks
Gold microelectrodes fabricated by a print-and-imprint method using laser-drilled polyimide through-hole masks
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DOI：
10.1116/1.4991629
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发表时间：
2017-09
期刊：
影响因子：
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通讯作者：
Takahiro Nakamura;Kento Seki;Kazuro Nagase;M. Nakagawa
中科院分区：
文献类型：
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作者：
Takahiro Nakamura;Kento Seki;Kazuro Nagase;M. Nakagawa
采用激光打孔和丝网印刷相结合的印刷压印方法，在硅衬底上制备了多组金(Au)四端微电极，包括100μm尺度焊盘电极和20μm宽引线。利用皮秒脉冲激光打孔12.5μm厚的聚酰亚胺(PI)薄膜，可以制备出具有设计的通孔图案的聚酰亚胺薄膜。随着激光重复频率的增加，PI薄膜的入射面和出射面的平均孔径均增大。利用直线电机工作台制备了具有亚微米位置精度的孔图案。液体紫外光(UV)固化树脂具有高粘度(11.0Pa S)和高耐Ar(Ar)离子束研磨的干法刻蚀性能，通过丝网印刷以液滴的形式放置在基片表面，与PI通孔掩膜的孔型相对应。液体的平均体积。
Multiple sets of gold (Au) four-terminal microelectrodes comprising 100 μm-scale pad electrodes and 20 μm-wide lead lines were fabricated on a silicon substrate by a print-and-imprint method involving laser drilling and screen printing. Laser drilling of 12.5 μm-thick polyimide (PI) sheets with a picosecond-pulse laser enabled the fabrication of PI membranes with designed patterns of through holes. The through holes had a frustum shape, and the average hole diameters on both the laser entry and exit sides of the PI films enlarged with an increase in the applied repetition rate. The hole patterns designed with submicrometer position accuracy were prepared using a linear motor stage. Liquid ultraviolet (UV)-curable resin, exhibiting a high viscosity (11.0 Pa s) and a high dry-etching resistance to argon (Ar) ion beam milling after UV curing, was placed onto a substrate surface as droplets by screen printing, corresponding to the hole patterns of the PI through-hole masks. The average volume of the liquid dr...