Multi-probe atomic force Microscopy with optical beam deflection method
Multi-probe atomic force Microscopy with optical beam deflection method
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DOI：
10.1143/jjap.46.5636
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发表时间：
2007-08-01
期刊：
影响因子：
--
通讯作者：
Yamada, Hirofumi
中科院分区：
文献类型：
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作者：
Tsunemi, Eika;Satoh, Nobuo;Yamada, Hirofumi
我们研制了一种多探针原子力显微镜（AFM），该显微镜采用光束偏转方法，具有两个独立控制的AFM悬臂梁。采用调频（FM）检测方法，成功地用两个独立探头同时获得图像。为了评估悬臂的AFM尖端之间的距离，我们使用了一种新的地址模式样本，这也是为本研究开发的。得到的图像显示探针之间的距离为2 μ m。多探针原子力显微镜的发展在当前纳米科学和工程领域开辟了广泛的应用。
We developed a multi-probe atomic force microscope (AFM) having two AFM cantilevers independently controlled using the optical beam deflection method. We succeeded in simultaneously obtaining images with two independent probes by frequency modulation (FM) detection method. To evaluate the distance between the AFM tips of the cantilevers, we used a new the address-patterned sample, which was also developed for this study. The images obtained show that the distance between the probes was 2 mu m. The development of the multi-probe AFM opens a wide variety of applications in the present nanoscience and engineering field.