Fast Trajectory Tracking of a Flexure-Based, Multiaxis Nanopositioner With 50-mm Travel
Fast Trajectory Tracking of a Flexure-Based, Multiaxis Nanopositioner With 50-mm Travel
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DOI：
10.1109/tmech.2018.2871162
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发表时间：
2018-12-01
影响因子：
6.4
通讯作者：
Cullinan, Michael A.
中科院分区：
文献类型：
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作者：
Roy, Nilabh K.;Cullinan, Michael A.
纳米定位阶段的精确、高速控制对于许多需要高通量的微尺度增材制造系统至关重要，例如微尺度选择性激光烧结（mu-SLS）。在mu-SLS中，定位级需要达到10 Hz步长，精度低于100 nm，行程范围为50 mm。研究结果表明，柔性阶段的开环分辨率为63 nm，稳定时间为1.27 s。对于在高通量mu-SLS中的应用来说，这个稳定时间太长了。为了提高平台对高达10hz的快速变化信号的跟踪性能并获得更好的分辨率，本文设计了XY平台的有限水平线性二次型调节器控制器。由于该控制器具有良好的阻尼特性，使其分辨率提高到8 nm，并能有效跟踪频率为10 hz的输入信号。随着谐振移位控制的增加，跟踪带宽提高到23hz。本文提出了一种低成本、大行程、低于10nm分辨率和高带宽XY定位系统的独特组合，这是在现成的纳米定位阶段或研究实验室中都找不到的。
The precise, high-speed control of nanopositioning stages is critical for many microscale additive manufacturing systems, such as microscale selective laser sintering (mu-SLS), where high throughput is needed. In mu-SLS, the positioning stage requires achieving 10 Hz steps with sub-100 nm accuracy and a travel range of 50 mm. The open-loop resolution and settling time of the flexure stage presented in the study are found to be 63 nm and 1.27 s, respectively. This settling time is too large for its application in high-throughput mu-SLS. To improve the tracking performance of the stage for fast varying signals up to 10 Hz and achieve better resolution, this paper presents the design of a finite horizon linear quadratic regulator controller for the XY stage. Owing to the good damping properties of the controller, the resolution is improved to 8 nm and input signals with 10-Hz frequency are effectively tracked. With the addition of a resonant shifting control, the tracking bandwidth is improved to 23 Hz. The paper presents a unique combination of low cost, large travel, sub-10 nm resolution and high-bandwidth XY positioning system, which is not to be found in either off-the-shelf nanopositioning stages or in research laboratories.