The role of metal and passivation defects in electromigration-induced damage in thin film conductors
The role of metal and passivation defects in electromigration-induced damage in thin film conductors
复制标题
金属和钝化缺陷在薄膜导体电迁移引起的损伤中的作用
DOI:
10.1016/0040-6090(82)90144-4
复制
发表时间:
1982
期刊:
影响因子:
2.1
通讯作者:
G. Prokop
中科院分区:
文献类型:
--
作者:
J. Lloyd;P. Smith;G. Prokop