Kinematic mirror mount design for ultra-precision manufacturing, metrology, and system level integration for high performance visible spectrum imaging systems
Kinematic mirror mount design for ultra-precision manufacturing, metrology, and system level integration for high performance visible spectrum imaging systems
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DOI：
10.1016/j.precisioneng.2019.09.011
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发表时间：
2019-11
期刊：
影响因子：
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通讯作者：
Nick Horvath;M. Davies;S. R. Patterson
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文献类型：
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作者：
Nick Horvath;M. Davies;S. R. Patterson
高性能自由曲面光学系统专为从可见光到远红外的宽光谱成像而设计，对光学设计、精密制造和精密计量提出了新的要求。为了满足这种系统中的形状、粗糙度和相对定位的公差，需要在连续反馈回路中对自由形式光学器件执行计量和制造校正的能力。这种反馈回路需要一个通用的加工和制造平台接口。本文介绍了这样一个接口的设计，分析和测试适用于单点金刚石车削和确定性微磨削。该接口采用扭转预加载、坚固耐用的运动支架，能够支持制造过程负载，同时保持光学图形测量和校正所需的五个自由度的位置重复性。原型系统的结果表明，绝对面内位置不确定度分别小于200 nm和50 nm，轴向位置不确定度为40 nm绝对值和10 nm相对值。绝对和相对角定位不确定度分别小于1 µrad和0.25 µrad。结果超过了许多光学系统的要求。该底座还适用于光机组装，因此同一平台可用于制造、计量、最终组装、测试和服务。
High-performance freeform optical systems, designed for broad spectral imaging from the visible to the far infrared, place new demands on optical design, precision manufacturing, and precision metrology. To meet the tolerances on figure, roughness, and relative positioning in such systems requires the ability to perform metrology and manufacturing corrections on freeform optics in a continuous feedback loop. This feedback loop requires a common interface for machining and manufacturing platforms. This paper describes the design, analysis, and testing of such an interface suitable for use with single point diamond turning and deterministic micro-grinding. The interface utilizes a torsionally preloaded, robust, kinematic mount capable of supporting manufacturing process loads while maintaining the position repeatability in five degrees of freedom required for the measurement and correction of optical figure. Results from a prototype system demonstrate absolute in-plane position uncertainty less than 200 nm and 50 nm, respectively, and axial position uncertainty is 40 nm absolute and 10 nm relative. The absolute and relative angular positioning uncertainties less than 1 µrad and 0.25 µrad respectively. The results exceed the requirements for many optical systems. The mount is also suitable for use in opto-mechanical assembly, so that the same platform can be used for manufacturing, metrology, final assembly, testing, and service.