A Novel Form Measurement System for Precision Components Using Interferometric Sub-aperture Stitching
A Novel Form Measurement System for Precision Components Using Interferometric Sub-aperture Stitching
复制标题
使用干涉子孔径拼接的新型精密部件形状测量系统
DOI：
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发表时间：
2014
期刊：
影响因子：
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通讯作者：
P. Lehmann
中科院分区：
文献类型：
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作者：
S. Laubach;G. Ehret;Holger Knell;P. Kuehnhold;P. Lehmann
目前，精密零件的光学形状测量方法有多种。光学单点传感器以及光学矩阵传感器被应用于该测量任务。用点传感器扫描样品需要很长的测量时间。因此，载物台的漂移或空气温度的变化会导致测量误差。使用矩阵传感器会产生大量数据，需要高计算能力，并且如果被调查对象正在移动，则可能会由于极低的帧速率而导致困难。另一种用于测量高度弯曲表面的方法是用于斐索零点测试的计算机生成全息图（CGH），但这是昂贵的，并且需要非常精确地制造CGH以及与被测物体的精确对准[1]。
Nowadays there are several approaches for optical form measurement of precision components. Optical single point sensors as well as optical matrix sensors are applied for this measurement task. Scanning a specimen with a point sensor requires long measuring times. Hence, drifts of the stages or variations of the air temperature can cause measurement errors. Using a matrix sensor yields to large amounts of data, needs high computing power and may lead to difficulties due to comparably low frame rates if the object under investigation is moving. Another approach for measuring highly curved surfaces are computer generated holograms (CGH) for a Fizeau null-test, but this is expensive and needs very accurate manufacturing of the CGH as well as a precise alignment to the object under test [1].