Integration of a silicon-based microprobe into a gear measuring instrument for accurate measurement of micro gears
Integration of a silicon-based microprobe into a gear measuring instrument for accurate measurement of micro gears
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DOI：
10.1088/0957-0233/25/6/064016
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发表时间：
2014-06-01
影响因子：
2.4
通讯作者：
Haertig, F.
中科院分区：
文献类型：
--
作者：
Ferreira, N.;Krah, T.;Haertig, F.
硅微探测系统集成到传统的齿轮测量仪器（GMIs）允许全自动测量的外部渐开线微型直齿轮的正常模块小于1毫米。该系统，基于硅微探针，已开发和制造的技术大学布伦瑞克的微技术研究所。微探针由硅传感器元件和垂直于传感器定向的触针组成。该传感器采用体硅微机械加工技术制作。其6.5 mm x 6.5 mm的小尺寸允许紧凑地安装在墨盒中，以便于集成到GMI中。以这种方式，可以实现3D微结构的触觉测量。为了实现三维测量与边缘力，四个惠斯通电桥是建立在传感器的膜扩散压敏电阻。在膜的背面，触针垂直于凸台上的传感器粘合，以在测量期间将探测力传递到传感器元件。小于300 μ m的球体直径和5 mm的轴长以及10 μ N的测量力使3D微观结构的测量成为可能。这种微型探测系统可以集成到通用坐标测量机中，也可以集成到GMI中，以扩展其应用领域。实际测量是在德国联邦物理技术研究所进行的，方法是在校准的参考球上对微探针进行鉴定，以确定其灵敏度和体积的物理尺寸。随后，在模数为1 mm的齿轮测量标准上进行了轮廓和螺旋测量。测量结果的比较表明，测量值与校准值之间具有良好的一致性。这一结果是一个有前途的基础上实现更小的探针直径的触觉测量的微型齿轮与较小的模块。
The integration of silicon micro probing systems into conventional gear measuring instruments (GMIs) allows fully automated measurements of external involute micro spur gears of normal modules smaller than 1 mm. This system, based on a silicon microprobe, has been developed and manufactured at the Institute for Microtechnology of the Technische Universitat Braunschweig. The microprobe consists of a silicon sensor element and a stylus which is oriented perpendicularly to the sensor. The sensor is fabricated by means of silicon bulk micromachining. Its small dimensions of 6.5 mm x 6.5 mm allow compact mounting in a cartridge to facilitate the integration into a GMI. In this way, tactile measurements of 3D microstructures can be realized. To enable three-dimensional measurements with marginal forces, four Wheatstone bridges are built with diffused piezoresistors on the membrane of the sensor. On the reverse of the membrane, the stylus is glued perpendicularly to the sensor on a boss to transmit the probing forces to the sensor element during measurements. Sphere diameters smaller than 300 mu m and shaft lengths of 5 mm as well as measurement forces from 10 mu N enable the measurements of 3D microstructures. Such micro probing systems can be integrated into universal coordinate measuring machines and also into GMIs to extend their field of application. Practical measurements were carried out at the Physikalisch-Technische Bundesanstalt by qualifying the microprobes on a calibrated reference sphere to determine their sensitivity and their physical dimensions in volume. Following that, profile and helix measurements were carried out on a gear measurement standard with a module of 1 mm. The comparison of the measurements shows good agreement between the measurement values and the calibrated values. This result is a promising basis for the realization of smaller probe diameters for the tactile measurement of micro gears with smaller modules.