Effect of Si content on the tribological properties of CrSiN films in air and water environments
Effect of Si content on the tribological properties of CrSiN films in air and water environments
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Si含量对CrSiN薄膜在空气和水环境中摩擦学性能的影响
DOI：
10.1016/j.triboint.2014.06.002
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发表时间：
2014-11-01
影响因子：
6.2
通讯作者：
Zhang, Guangan
中科院分区：
文献类型：
--
作者：
Geng, Zhongrong;Wang, Haixin;Zhang, Guangan
采用反应磁控溅射法在不锈钢和硅衬底（100）上制备了不同Si含量的CrSiN薄膜。研究了Si/（Cr +Si）比对合金显微组织、力学性能和摩擦学性能的影响。发现硬度达到其最大值约22 GPa。研究了Si/（Cr+Si）比变化对CrSiN薄膜在空气和水环境中磨损机理的影响。摩擦接触区发生了摩擦化学反应，形成了非晶态氧化层，这是CrSiN薄膜摩擦系数和磨损率低的原因。(C)2014爱思唯尔有限公司版权所有。
The CrSiN films with different Si contents were deposited on stainless steel and silicon substrate (100) by reactive magnetron sputtering. The microstructures, mechanical properties and tribological properties were investigated as a function of Si/(Cr +Si) ratio. It was found that the hardness reached its maximum value of approximately 22 GPa. The wear mechanism of CrSiN films were investigated as the Si/(Cr+Si) ratio changed in the air and water environment. The tribochemical reaction was found to occur in the wear contact area, and this caused CrSiN films to form the amorphous oxide layer which was the reason for the low fiction coefficient and low wear rate. (C) 2014 Elsevier Ltd. All rights reserved.