High-precision local transfer of van der Waals materials on nanophotonic structures
High-precision local transfer of van der Waals materials on nanophotonic structures
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DOI：
10.1364/ome.383255
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发表时间：
2019-07
影响因子：
2.8
通讯作者：
D. Rosser;Taylor Fryett;Abhi Saxena;A. Ryou;A. Majumdar
中科院分区：
文献类型：
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作者：
D. Rosser;Taylor Fryett;Abhi Saxena;A. Ryou;A. Majumdar
在致密的纳米光子器件上制作货车德瓦尔斯材料的原型需要高精度的单层鉴别，以避免大块材料污染。我们使用聚碳酸酯的玻璃化转变温度，在标准的干转移过程中使用，绘制一个原位点，用于精确拾取二维材料。我们将过渡金属二硫属化物单层转移到大面积氮化硅螺旋波导和氮化硅环形谐振器上，以证明改进的干转移方法的高精度无污染性。我们改进的本地传输技术是一个必要的步骤，确定性集成的高品质的货车德瓦尔斯材料到纳米腔的探索少光子非线性光学的高通量，纳米制造兼容的平台。
Prototyping of van der Waals materials on dense nanophotonic devices requires high-precision monolayer discrimination to avoid bulk material contamination. We use the glass transition temperature of polycarbonate, used in the standard dry transfer process, to draw an in situ point for the precise pickup of two dimensional materials. We transfer transition metal dichalcogenide monolayers onto a large-area silicon nitride spiral waveguide and silicon nitride ring resonators to demonstrate the high-precision contamination-free nature of the modified dry transfer method. Our improved local transfer technique is a necessary step for the deterministic integration of high-quality van der Waals materials onto nanocavities for the exploration of few-photon nonlinear optics on a high-throughput, nanofabrication-compatible platform.