Enhanced switching stability in Ta2O5 resistive RAM by fluorine doping

Enhanced switching stability in Ta2O5 resistive RAM by fluorine doping
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DOI:
10.1063/1.4991879
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发表时间:
2017-08-28
影响因子:
4
通讯作者:
Chalker, P. R.
Chalker, P. R.
中科院分区:
物理与天体物理2区
文献类型:
--
作者:
Sedghi, N.;Li, H.;Chalker, P. R.

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The effect of fluorine doping on the switching stability of Ta2O5 resistive random access memory devices is investigated. It shows that the dopant serves to increase the memory window and improve the stability of the resistive states due to the neutralization of oxygen vacancies. The ability to alter the current in the low resistance state with set current compliance coupled with large memory window makes multilevel cell switching more favorable. The devices have set and reset voltages of