Two-Photon Polymerization: A New Approach to Micromachining Femtosecond lasers enable microfabrication with resolution beyond the diffraction limit.
Two-Photon Polymerization: A New Approach to Micromachining Femtosecond lasers enable microfabrication with resolution beyond the diffraction limit.
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双光子聚合：微加工的新方法飞秒激光器可实现分辨率超出衍射极限的微加工。
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发表时间：
2006
期刊：
影响因子：
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通讯作者：
L. Hannover
中科院分区：
文献类型：
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作者：
A. Ostendorf;B. Chichkov;L. Hannover
超短激光系统的发展正在为激光能量在时间和空间上的精确定位创造令人兴奋的可能性。这些成就引发了基于非线性相互作用过程的新型激光应用。最近引起广泛关注的一种有前途的三维微加工方法是基于超短激光脉冲的双光子聚合。1-5 当聚焦到感光材料（或光致抗蚀剂）的体积中时，脉冲通过双光子吸收和随后的聚合引发双光子聚合。在光刻胶体积内的所需结构被照射并随后显影之后（例如，冲洗掉未照射的区域），聚合材料仍保持规定的 3D 形式。这允许通过直接激光“记录”到感光材料的体积中来制造任何计算机生成的 3D 结构（图 1）。由于该过程的阈值行为和非线性性质，可以通过控制激光脉冲能量和施加的脉冲数量来实现超出衍射极限的分辨率。因此，该技术提供了比现有技术更好的结构分辨率和质量。
ment of ultrashort laser systems is creating exciting possibilities for very precise localization of laser energy in time and space. These achievements have triggered novel laser applications based on nonlinear interaction processes. A promising three-dimensional microfabrication method that has recently attracted considerable attention is based on twophoton polymerization with ultrashort laser pulses.1-5 When focused into the volume of a photosensitive material (or photoresist), the pulses initiate two-photon polymerization via two-photon absorption and subsequent polymerization. After illumination of the desired structures inside the photoresist volume and subsequent development — e.g., washing out the nonilluminated regions — the polymerized material remains in the prescribed 3-D form. This allows fabrication of any computer-generated 3-D structure by direct laser “recording” into the volume of a photosensitive material (Figure 1). Because of the threshold behavior and nonlinear nature of the process, a resolution beyond the diffraction limit can be realized by controlling the laser pulse energy and the number of applied pulses. As a result, the technique provides much better structural resolution and quality than the