Formation process of high thermal-stability diamond/Si and diamond/GaAs heterointerfaces by surface activated bonding
Formation process of high thermal-stability diamond/Si and diamond/GaAs heterointerfaces by surface activated bonding
复制标题
表面活化键合高热稳定性金刚石/Si和金刚石/GaAs异质界面的形成过程
DOI:
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发表时间:
2020
期刊:
影响因子:
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通讯作者:
N. Shigekawa
中科院分区:
文献类型:
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作者:
Y. Ohno;J. Liang;Y. Shimizu;H. Yoshida;N. Shigekawa