Around the bend
Around the bend
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拐弯处
DOI：
10.1038/nmat3192
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发表时间：
2011
期刊：
影响因子：
41.2
通讯作者：
J. Heber
中科院分区：
文献类型：
--
作者：
J. Heber
已经有一些令人印象深刻的光子器件的例子，旨在新的平台，如可拉伸基板。然而，尽管诸如发光二极管之类的较大规模的常规器件已经被广泛证明用于这样的平台，但是纳米级结构的制造仍然具有挑战性。Hatice Altug及其同事现在已经开发出一种沉积技术，能够在柔性基底上以纳米级精度制造等离子体结构。他们的方法是基于纳米模板光刻，其中模板掩模放置在衬底上，并且所需的金属结构通过掩模中的孔在衬底上蒸发。去除掩模暴露出期望的结构。在本发明的情况下，使用氮化硅掩模在可拉伸的聚合物基底上存款金纳米结构，具有10 nm的显著精度。聚合物片非常柔韧，例如，可以放置在光纤的表面周围。等离子体现象在分子传感等应用中的使用增加表明，这种低成本和高通量的制造工艺可能会导致用于此类用途的设备。JH
There have been some impressive examples of photonic devices aimed at new platforms such as stretchable substrates. However, although larger-scale conventional devices such as light-emitting diodes have been widely demonstrated for such platforms, the fabrication of nanoscale structures has remained challenging. Hatice Altug and colleagues have now developed a deposition technique that is able to fabricate plasmonic structures on flexible substrates with nanoscale precision. Their approach is based on nanostencil lithography, where a stencil mask is placed on a substrate and the desired metallic structures are evaporated on the substrate through the holes in the mask. Removal of the mask exposes the desired structures. In the present case, a silicon nitride mask was used to deposit gold nanostructures on a stretchable polymer substrate, with a remarkable accuracy of 10 nm. The polymer sheets are very flexible and can, for example, be placed around the surface of an optical fibre. The rise in the use of plasmonic phenomena for applications such as molecular sensing suggests that this low-cost and highthroughput fabrication process could lead to devices for such uses. JH