Mechanical Properties of Thin Films
Mechanical Properties of Thin Films
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DOI：
10.1146/annurev.ms.20.080190.002135
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发表时间：
1990-08
期刊：
影响因子：
--
通讯作者：
P. Alexopoulos;T. O'sullivan
中科院分区：
文献类型：
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作者：
P. Alexopoulos;T. O'sullivan
由于薄膜具有独特的微观结构、大的表面积体积比、尺寸的减小以及衬底对薄膜的约束，使得薄膜的力学性能不同于体材料。由于基板是单层和多层薄膜结构的机械性能的关键因素，本文将限制在基板上的薄膜的机械性能。自支撑薄膜的机械性能先前由Hardwick（1）进行了综述。由于主题的多样性和出版物的绝对数量，对薄膜的机械性能领域进行完整的回顾是不可能的。重点将是薄金属和陶瓷薄膜的厚度小于1 μ m。将审查测量技术和最近的结果，并确定今后的工作领域。了解控制薄膜结构的机械性能的过程在各种科学和技术应用中是重要的。在过去的几十年里，科学竞技场已经看到了干法沉积工艺的发展，例如物理气相沉积（PVD）和化学气相沉积（CVD），以及改进的原位表征和分析技术的出现：即X射线光电子能谱（XPS）、俄歇能谱、低能电子衍射（LEED）、X射线光电子能谱（XPS）和X射线光电子能谱（XPS）。以及布里渊散射，其允许相对容易地沉积不寻常的微观结构，包括晶体和非晶体，以及具有几个单层的受控和可再现周期的分层结构。层压薄膜结构已被生产具有定制的弹性和塑性性能。详细的表征和
The mechanical properties of thin films are different from those of bulk materials because of their unique microstructure, large surface-to-volume ratio, reduced dimensions, and the constraints caused by the substrate. Since the substrate is a key factor in the mechanical properties of single and multilayered thin film structures, this paper will limit itself to the mechanical properties of thin films on substrates. The mechanical prop erties of free-standing thin films were previously reviewed by Hardwick ( 1 ) . Because of the diversity of the subject and the sheer volume of pub lications, a complete review of the area of mechanical properties of thin films is impossible. Focus will be on thin metal and ceramic films with thickness less than I J-lm. Measurement techniques and recent results will be reviewed and areas of future work will be identified. Understanding the processes controlling the mechanical properties of thin film structures is important in a variety of scientific and technological applications. In the last few decade� the �cientific arena has seen the development of dry deposition processes, such as physical vapor deposition (PVD) and chemical vapor deposition (CVD), as well as the appearance of improved in situ characterization and analysis techniques: i.e. X-ray photoemission spectroscopy (XPS); Auger spectroscopy; low energy elec tron diffraction (LEED); and Brillouin scattering that allows relatively easy deposition of unusual microstructures, both crystalline and amorphous, as well as layered structures with controlled and reproducible periods of a few monolayers. Laminated thin film structures have been produced with tailored elastic and plastic properties. Detailed characterization and