Grain and subgrain characterisation by electron backscatter diffraction
Grain and subgrain characterisation by electron backscatter diffraction
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通过电子背散射衍射表征晶粒和亚晶粒
DOI：
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发表时间：
2001
期刊：
影响因子：
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通讯作者：
F. Humphreys
中科院分区：
文献类型：
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作者：
F. Humphreys
本文讨论了自动电子背散射衍射（EBSD）在扫描电子显微镜中定量分析晶粒和亚晶粒组织的应用，并与传统的定量金相方法进行了比较。结果表明，该技术已达到一个成熟的状态，这样的线扫描和地图，可以定期获得和分析使用市售的设备和EBSD在场发射扫描电镜（FEGSEM）允许定量分析的晶粒/亚晶粒小至0.2 μm。EBSD通常可以比传统成像方法更准确地测量晶粒和亚晶粒尺寸，通常在可比的时间内。虽然EBSD有限的角分辨率在某些情况下可能会有问题，但亚晶粒/细胞测量可能比TEM更容易进行。EBSD提供的额外信息而不是传统的显微镜，为定量金相提供了一个新的维度。织构及其与晶粒或亚晶粒尺寸、形状和位置的相关性很容易测量。边界取向差，这是很容易获得的EBSD，使分布的边界类型被确定和CSL边界可以识别和测量。样品中储存能量的空间分布和再结晶的量也可以通过EBSD方法测量。
The application of automated Electron Backscatter Diffraction (EBSD) in the scanning electron microscope, to the quantitative analysis of grain and subgrain structures is discussed and compared with conventional methods of quantitative metallography. It is shown that the technique has reached a state of maturity such that linescans and maps can routinely be obtained and analysed using commercially available equipment and that EBSD in a Field Emission SEM (FEGSEM) allows quantitative analysis of grain/subgrains as small as ∼0.2 μm. EBSD can often give more accurate measurements of grain and subgrain size than conventional imaging methods, often in comparable times. Subgrain/cell measurements may be made more easily than in the TEM although the limited angular resolution of EBSD may be problematic in some cases. Additional information available from EBSD and not from conventional microscopy, gives a new dimension to quantitative metallography. Texture and its correlation with grain or subgrain size, shape and position are readily measured. Boundary misorientations, which are readily obtainable from EBSD, enable the distribution of boundary types to be determined and CSL boundaries can be identified and measured. The spatial distribution of Stored Energy in a sample and the amount of Recrystallization may also be measured by EBSD methods.