Monolithic Integrated Piezoelectric MEMS-Tunable VCSEL
Monolithic Integrated Piezoelectric MEMS-Tunable VCSEL
复制标题
单片集成压电 MEMS 可调谐 VCSEL
DOI：
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发表时间：
2007
影响因子：
4.9
通讯作者：
C. Chang
中科院分区：
文献类型：
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作者：
M.C.Y. Huang;Kan Bun Cheng;Ye Zhou;A. Pisano;C. Chang
利用Al xGa 1-x As化合物固有的压电特性，提出了一种用于短波长可调谐垂直腔面发射激光器的新型驱动机制。压电致动可以提供精确的双向位移和相对于所施加的电压的线性调谐特性，不会受到行程限制和灾难性的电损坏，消耗低功率（~1 μ W），并且与热致动相比具有相对较快的响应。此外，基于AlxGa 1-xAs膜的压电致动提供了与氧化锌和石英的压电耦合系数相当的大的压电耦合系数，并且它可以与高速电子和光电器件集成。实验上获得了线性连续调谐范围为3 nm、低功耗的单模发射
A novel actuation mechanism that utilizes the inherent piezoelectric properties of Al xGa1-x As compounds is presented for short-wavelength microelectromechanical systems tunable vertical-cavity surface-emitting laser centered at 850 nm. Piezoelectric actuation can provide precise bidirectional displacements and linear tuning characteristics with respect to the applied voltage, does not suffer from travel limitations and catastrophic electrical damage, consumes low power (~1 muW), and has a relatively fast response compared to thermal actuation. In addition, piezoelectric actuation based on AlxGa 1-xAs films offers a large piezoelectric coupling coefficient comparable to those of zinc oxide and quartz, and it can be integrated with high-speed electronic and optoelectronic devices. Single-mode emission with a linear continuous tuning range of 3 nm and low power consumption were experimentally obtained