Roll-to-roll sputter deposition of transparent conducting In4Sn3O12 onto flexible polymer substrates using DC sputtering and HIPIMS

Roll-to-roll sputter deposition of transparent conducting In4Sn3O12 onto flexible polymer substrates using DC sputtering and HIPIMS
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使用 DC 溅射和 HIPIMS 将透明导电 In4Sn3O12 卷对卷溅射沉积到柔性聚合物基板上

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通讯作者:
Phillip Butler (Co-Author)
Phillip Butler (Co-Author)
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作者:
Phillip Butler (Co-Author)

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