Slit Structure as a Countermeasure for the Thermal Deformation of a Metal Mask
Slit Structure as a Countermeasure for the Thermal Deformation of a Metal Mask
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狭缝结构作为金属掩模热变形对策
DOI：
10.1143/jjap.40.7170
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发表时间：
2001
影响因子：
1.5
通讯作者：
T. Mizuguchi
中科院分区：
文献类型：
--
作者：
T. Yamazaki;Toshio Yoshizawa;T. Yamabuchi;S. Hirobayashi;T. Kikuta;N. Nakatani;T. Mizuguchi
用于溅射膜的图案形成的金属掩模有时在膜沉积期间变形，因为其温度在沉积期间升高。在这项研究中，狭缝结构作为变形的对策提出。研究的掩模是由0.3毫米厚的不锈钢制成的，并由一个框架与许多梁内运行的框架。结构中的狭缝吸收梁的热膨胀，这导致梁中的热应力松弛。利用有限元法和梁弯曲理论分析了应力的松弛。实验证实，配备有精心设计的狭缝的掩模不会变形。
A metal mask used for the pattern formation of sputtered films is sometimes deformed during film deposition, because its temperature increases during deposition. In this study, a slit structure as a countermeasure for the deformation is proposed. The mask investigated is made of 0.3-mm-thick stainless steel and is composed of a frame with many beams running inside the frame. The slits in the structure absorb the thermal expansion of the beams, which results in the relaxation of thermal stress in the beams. The relaxation of the stress is analyzed using the finite element method as well as the theory of beam bending. It was experimentally confirmed that a mask furnished with well-designed slits was not deformed.