Laser interaction in sol–gel based materials—3-D lithography for photonic applications
Laser interaction in sol–gel based materials—3-D lithography for photonic applications
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溶胶-凝胶基材料中的激光相互作用——用于光子应用的 3D 光刻
DOI：
10.1016/j.apsusc.2005.01.164
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发表时间：
2005
影响因子：
6.7
通讯作者：
R. Houbertz
中科院分区：
文献类型：
--
作者：
R. Houbertz
作为激光与聚合物材料相互作用的一个例子，利用双光子吸收(TPA)过程，利用飞秒激光脉冲聚合了无机-有机杂化聚合物。该材料是通过催化控制缩聚反应合成的，得到了一种储存稳定的树脂，该树脂由无机(Siosi)纳米单元组成，这些单元分别与典型的(低聚)甲基丙烯基和苯乙烯基进行了有机官能化。这导致了可以通过单光子或双光子吸收来图案化的材料。后一种方法允许人们直接将三维任意结构写入杂化聚合物材料中，分辨率可达200 nm甚至更低。材料和图案化工艺将结合在光子器件中的应用进行讨论。
As an example for laser interactions with polymer materials, inorganic–organic hybrid polymers were polymerized with femtosecond laser pulses, making use of two-photon absorption (TPA) processes. The material was synthesized by catalytically controlled polycondensation reactions, resulting in a storage-stable resin which is built up by inorganic (SiOSi) nm-size units which are organically functionalized with typically (oligo-)methacryl and styryl moieties, respectively. This results in materials which can be patterned by single- or two-photon absorption. The latter method allows one to directly write arbitrary structures in three dimensions into the hybrid polymer material with a resolution down to 200nm or even below. The materials and the patterning process will be discussed with respect to applications in photonic devices.