Analysis of Electrochemical Impedance Response of Copper Wiring Corrosion Sensor Fabricated by Screen Printing

Analysis of Electrochemical Impedance Response of Copper Wiring Corrosion Sensor Fabricated by Screen Printing
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丝网印刷铜线腐蚀传感器电化学阻抗响应分析

DOI:
10.4139/sfj.70.215
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发表时间:
2019
期刊:
Journal of The Surface Finishing Society of Japan
影响因子:
--
通讯作者:
M. Itagaki
M. Itagaki
中科院分区:
--
文献类型:
--
作者:
Yoshinao Hoshi;Akihiro Aiba;Naoto Fujii;Isao Shitanda;M. Itagaki

文献摘要

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采用丝网印刷技术制备了一种基于阻抗响应的铜线腐蚀传感器。在采用双电极系统进行阻抗测量时,将含有1 M NaCl溶液的滤纸(FP)设置在CCS的锯齿形导电部分,以控制湿区。选择任意宽度w或长度L的FP值来研究沿着或穿过导电部件方向的短路电流。不同w值下的阻抗谱在奈奎斯特平面上呈环状。环径d随FP值的增大而增大。在FP的不同L值的阻抗谱中观察到部分环路。从回路各部分估计的d值随着FP的L值的增加而增加。结果表明,这些回路与铜线/电解液界面有关,d值随导电部位湿面积的增大而增大。电化学阻抗模拟结果表明:溶液电阻R与L值呈负相关;双电层电容C dl随FP L值的增大而线性增大;R - sol和C - dl随FP w值的增加而线性增加。结果表明,阻抗响应与穿过CCS导电部分方向的短路电流密切相关。
An impedance - response - based copper wiring corrosion sensor ( CCS ) was fabricated using screen printing technique. Filter paper ( FP ) con taining 1 M NaCl solution was set on the zigzag conducting parts of the CCS to control the wet area during impedance measurements using a two - electrode system. Arbitrary values of width w or length L of the FP were chosen to investigate the short circuit current in the direction along or crossing the conducting parts. Impedance spectra with different w values of the FP showed a loop on the Nyquist plane. Loop diameter d increased concomitantly with increasing w values of the FP. Part of the loop was observed in the impedance spectra with different L values of the FP. Values of d estimated from respective parts of the loop increased concomitantly with increasing L values of the FP. Results indicate that these loops are related to the copper - wiring / electrolyte solution interface and that d values increase concomitantly with increasing wet area on the conducting parts. Results of the electrochemical impedance simulation demonstrated the following: solution resistance R sol is inversely related to the L values; the electric double layer capacitance C dl increased linearly, concomitantly with increasing L values of the FP; and R sol and the C dl increased linearly, concomitantly with increasing w values of the FP. Results demonstrate that the impedance response is related closely to the short circuit current in the direction crossing the conducting parts of the CCS.