Direct current plasma jet needle source
Direct current plasma jet needle source
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DOI：
10.1088/0022-3727/40/23/017
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发表时间：
2007-12
期刊：
影响因子：
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通讯作者：
D. Dudek;N. Bibinov;J. Engemann;P. Awakowicz
中科院分区：
文献类型：
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作者：
D. Dudek;N. Bibinov;J. Engemann;P. Awakowicz
以氮气作为进料气体，对在辉光模式下运行的直流等离子体射流源进行了研究。这种等离子体射流会产生原子通量，这些原子是在阴极尖端附近的小区域内产生的，该区域具有高亮度和高的分子解离率。被进料气体流从该区域带走的氮原子形成了等离子体射流源的狭窄射流。尽管在阴极尖端附近的活性等离子体区域温度相对较高，可达950K，但射流中的气体温度低于400K。
Direct current plasma jet source operated in a glow regime is studied by applying nitrogen as a feed gas. This plasma jet generates fluxes of atoms, which are produced in the small region near the cathode tip characterized by high luminosity and a high dissociation rate of molecules. The nitrogen atoms carried away from this region by the feed gas flow form the narrow effluent of the plasma jet source. The gas temperature in the effluent flow is lower than 400 K despite the relatively high temperature of up to 950 K in the active plasma zone near the cathode tip.