Room-temperature solid-phase epitaxial growth of β-Ga2O3 thin films on NiO-buffered sapphire (0001) substrates by KrF excimer laser annealing

Room-temperature solid-phase epitaxial growth of β-Ga2O3 thin films on NiO-buffered sapphire (0001) substrates by KrF excimer laser annealing
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通过 KrF 准分子激光退火在 NiO 缓冲蓝宝石 (0001) 衬底上室温固相外延生长 β-Ga2O3 薄膜

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发表时间:
2015
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通讯作者:
and Mamoru Yoshimoto
and Mamoru Yoshimoto
中科院分区:
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文献类型:
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作者:
Daishi Shiojiri;Daiji Fukuda;Nobuo Tsuchimine;Koji Koyama;Satoru Kaneko;Akifumi Matsuda;and Mamoru Yoshimoto

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