Effect of tip geometry on local indentation modulus measurement via atomic force acoustic microscopy technique
Effect of tip geometry on local indentation modulus measurement via atomic force acoustic microscopy technique
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DOI：
10.1063/1.2044607
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发表时间：
2005-09-01
影响因子：
1.6
通讯作者：
Ciavarella, M
中科院分区：
文献类型：
--
作者：
Passeri, D;Bettucci, A;Ciavarella, M
原子力声显微镜（AFAM）是一种基于原子力声显微镜的动态技术，在材料局部弹性特性的无损分析中具有广阔的应用前景。AFAM技术代表了一种强大的调查工具，以便在纳米尺度上检索机械参数的定量评估。AFAM技术对弹性性能的定量测定受到许多实验参数的强烈影响，而这些参数目前还不能完全控制。其中一个问题是，定量评估需要在测量过程中有效接触表面的尖端几何知识。我们提出并讨论了一种实验方法，能够首先从接触刚度测量中确定尖端几何形状，并根据获得的信息测量样品压痕模量。该技术的可靠性和准确性已经成功地在样品（Si， GaAs和InP）上进行了测试，这些样品具有众所周知的结构和形态特性，并且文献中广泛报道了压痕模量。(c) 2005年美国物理研究所。
Atomic force acoustic microscopy (AFAM) is a dynamical AFM-based technique very promising for nondestructive analysis of local elastic properties of materials. AFAM technique represents a powerful investigation tool in order to retrieve quantitative evaluations of the mechanical parameters, even at nanoscale. The quantitative determination of elastic properties by AFAM technique is strongly influenced by a number of experimental parameters that, at present, are not fully under control. One of such issues is that the quantitative evaluation require the knowledge of the tip geometry effectively contacting the surface during the measurements. We present and discuss an experimental approach able to determine, at first, tip geometry from contact stiffness measurements and, on the basis of the achieved information, to measure sample indentation modulus. The reliability and the accuracy of the technique has been successfully tested on samples (Si, GaAs, and InP) with very well known structural and morphological properties and with indentation modulus widely reported in literature. (c) 2005 American Institute of Physics.