An optimised silicon piezoresistive microcantilever sensor for surface stress studies
An optimised silicon piezoresistive microcantilever sensor for surface stress studies
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DOI：
10.1007/s00542-015-2615-3
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发表时间：
2015-07
期刊：
影响因子：
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通讯作者：
M. Z. Ansari;C. Cho
中科院分区：
文献类型：
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作者：
M. Z. Ansari;C. Cho
表面应力是研究各种物理、化学、生化和生物过程的一种通用而有效的手段。这项工作致力于开发高灵敏度的压阻式微悬臂梁设计来研究表面应力。悬臂梁是由硅制成的，在其底部有矩形孔洞，这些孔洞也包围了压阻传感元件。利用有限元分析软件分析了悬臂梁宽度、矩形孔长和掺杂类型对挠度、频率和最大应力等力学性能的影响，找出了最佳设计方案。通过在悬臂梁顶部施加表面应力，确定了不同悬臂梁设计的表面应力敏感特性。结果表明，随着悬臂梁宽度和孔长的增加，灵敏度增加，p型设计的灵敏度是n型设计的两倍多。
Surface stress is a versatile and efficient means to study various physical, chemical, biochemical and biological processes. This work focuses on developing high sensitive piezoresistive microcantilever designs to study surface stress. The cantilevers are made of silicon with rectangular holes at their base that also circumscribe a piezoresistor sensing element. To find the optimum design, the effects of change in cantilever width, rectangular hole length and type of dopant on mechanical properties like deflection, frequency and maximum stress are characterised using finite element analysis software. The surface stress sensitivity characteristics of the different cantilever designs is ascertained by applying a surface stress on their top surfaces. Results show that the sensitivity is increased by increasing the cantilever width as well as the length of the hole and the sensitivity of p-type designs is more than two times the n-type.