High-Resolution Pattern Reproduction by Cold Ultra Violet Stamping in Optical Polymeric Films
High-Resolution Pattern Reproduction by Cold Ultra Violet Stamping in Optical Polymeric Films
复制标题
通过光学聚合物薄膜中的冷紫外线冲压实现高分辨率图案再现
DOI：
10.1143/jjap.42.2541
复制
发表时间：
2003
影响因子：
1.5
通讯作者：
N. Okamoto
中科院分区：
文献类型：
--
作者：
Pavol Gustafik;O. Sugihara;H. Fujimura;N. Okamoto
在本文中，我们提出了一种新的方法，波导型器件制造使用的光学聚合物。这种方法被应用到顶部的聚合物波导膜上的光栅的制造，我们使用的混合物的季戊四醇三丙烯酸酯，N-甲基二乙醇胺，和曙红作为聚合物材料。该混合物，此后称为PNME，用作负型光致抗蚀剂聚合物材料。将材料暴露于特定波长的光使材料固化。利用PNME的这种特殊性质以及在固化之前PNME材料是液体的事实，从而复制了包含它的容器的体积，我们能够制造在其表面上具有浮雕光栅的聚合物膜和波导。还确定了容器侧壁和PNME材料之间的界面在制造过程中起着至关重要的作用。此外，所提出的制造方法是高分辨率、高输出和低成本的光学器件制造方法，因此它特别适合于商业用途。
In this paper, we present a new method of waveguide-type device fabrication using an optical polymer. This method is applied to the fabrication of a grating on top of a polymeric waveguide film where, we used a mixture of pentaerythritol triacrylate, N-methyldiethanolamin, and eosin as a polymer material. This mixture, called henceforward PNME, acts as a negative-type photoresist polymeric material. Exposure of the material to light of specific wavelength makes the material solidify. Using this particular property of PNME and the fact that before the solidification PNME material is liquid, and thus copies the volume of the vessel where it is contained, we were able to fabricate polymeric films and waveguides with a relief grating on their surfaces. It was also determined that the interface between the side walls of the vessel and the PNME material plays a vital role in the fabrication process. Moreover, the presented method of fabrication is a high-resolution, high-output, and low-cost method of optical device fabrication and thus it is particularly suitable for commercial use.